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1984 MOS Products Catalog /

1984 MOS Products Catalog / Materials and process integration for MEMS AMI A Subsidiary of Gould Inc. - 2nd ed. - Santa Clara, Boston : Gould AMI Semicondactors, c1984. - 9.48, 47 p. : ill. ; 25 cm. - Microsystems ; v. 9 . - Microsystems (Series) ; v. 9. .

Includes bibliographical references and index.

Subjects--Topical Terms:
Microelectromechanical systems--Catalog.

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