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Functional thin films and nanostructures for sensors : synthesis, physics and applications /

Functional thin films and nanostructures for sensors : synthesis, physics and applications / Anis Zribi, Jeffrey Fortin, editors. - New York : Springer, c2009. - xvii, 213 p. : ill. ; 25 cm. - Integrated analytical systems . - Integrated analytical systems. .

Includes bibliographical references and index.

Sensor design guidelines / Anis Zribi -- Transduction principles / Jeffrey Fortin -- Growth and synthesis of nanostructured thin films / Yiping Zhao -- Integrated micromachining technologies for transducer fabrication / Wei Cheng Tian -- Applications of functional thin films and nanostructures in gas sensing / Audrey Nelson -- Chemical sensors : new ideas for the mature field / Radislav A. Potyrailo -- Applications of functional thin films for mechanical sensing / Chang Liu -- Sensing infrared and terahertz regions by functional films / Magnus Willander, Victor Ryzhii, Qingxiang Zhao.

0387362290 (hbk. : alk. paper) 0387686096 (ebk.) 9780387362298 (hbk. : alk. paper) 9780387686097 (ebk.)

2008944096


Detectors.
Nanoelectromechanical systems.
Thin film devices.
Dèunne Schicht.
Nanostrukturiertes Material.
Sensor.


Aufsatzsammlung.

TK7872.T55 / F863 2009

621.3815/2