Study of the physical properties of the semiconductor polymer thin films prepared by plasma enhanced chemical vapor deposition /
Tareq Mohamed Jamel Ashour
Study of the physical properties of the semiconductor polymer thin films prepared by plasma enhanced chemical vapor deposition / دراسة الخواص الفيزيائية للأغشية الرقيقة المكونة من اشباه الموصلات البوليمر المحضرة باستخدام عملية التبخير الكيميائى المعززة بالبلازما Tareq M.J.Ashour ; Supervised Lotfi Z.Ismail , M.Salah Eldessouki , Magdy M.Omar - Cairo : Tareq Mohamed Jamel Ashour , 2008 - 84Leaves : charts , facsimiles ; 30cm
Thesis (Ph.D.) - Cairo University - Faculty Of Science - Department Of Physics
The present work aims to produce semiconductor thin film using low - pressure microwave plasma chemical vapor deposition (LPMP - CVD) techique.This deposition has been done by constructing a special geometrical arrangement for sample boat and substrate inside the microwave plasma chamber
N2 - laser Nano - particles semi conductor Plasma
Study of the physical properties of the semiconductor polymer thin films prepared by plasma enhanced chemical vapor deposition / دراسة الخواص الفيزيائية للأغشية الرقيقة المكونة من اشباه الموصلات البوليمر المحضرة باستخدام عملية التبخير الكيميائى المعززة بالبلازما Tareq M.J.Ashour ; Supervised Lotfi Z.Ismail , M.Salah Eldessouki , Magdy M.Omar - Cairo : Tareq Mohamed Jamel Ashour , 2008 - 84Leaves : charts , facsimiles ; 30cm
Thesis (Ph.D.) - Cairo University - Faculty Of Science - Department Of Physics
The present work aims to produce semiconductor thin film using low - pressure microwave plasma chemical vapor deposition (LPMP - CVD) techique.This deposition has been done by constructing a special geometrical arrangement for sample boat and substrate inside the microwave plasma chamber
N2 - laser Nano - particles semi conductor Plasma