MEMS - based inertial sensors : design and implememtation / Abdelhameed Elsayed Hamed Sharaf ; Supervsed Serag Eldin Elsayed Habib , Sherif Salah Eldin Sedky , Mahmoud Ali Ashour
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- تصميم وبناء الانظمة الكهروميكانيكية المتناهية فى الصغر [Added title page title]
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قاعة الرسائل الجامعية - الدور الاول | المكتبة المركزبة الجديدة - جامعة القاهرة | Cai01.13.08.Ph.D.2011.Ab.M (Browse shelf(Opens below)) | Not for loan | 01010110055625000 | ||
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مخـــزن الرســائل الجـــامعية - البدروم | المكتبة المركزبة الجديدة - جامعة القاهرة | Cai01.13.08.Ph.D.2011.Ab.M (Browse shelf(Opens below)) | 55625.CD | Not for loan | 01020110055625000 |
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Thesis (Ph.D.) - Cairo University - Faculty of Engineering - Department of Electronics and Communication
This dissertation presents a detailed review of the micromachined inertial sensors . Three novel gyroscopes are designed analyzed and fabricated . The measurement setup used to characterize the fabricated devices is presented . Promising performance is obtained . A novel accelerometer structure is proposed which is based on a novel vertical suspension approach
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