Sensitivity improvement of micro-diaphragm deflection in optical MEMS sensor as applied to pulse pressure detection / Abdelhaleim Hasan Elhag Osaman Abdallah ; Supervised Amr Abdurrahman Sharawi
Material type:
- تحسين حساسية انحراف الصفيحة الصغيرة المستخدمة فى حساس الميمز البصرى لقياس ضغط الدم النابض [Added title page title]
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Thesis (M.Sc.) - Cairo University - Faculty of Engineering - Department of Systems and Biomedical Engineering
In this thesis sensitivity of micro-diaphragm deflection in optical micro electro mechanical system (MEMS) sensor as applied to pulse pressure detection was improved . Thus was introduced to determine the safety of the person measured pulse of cardiovascular disease and atherosclersis . The deflection sensitivity improvement was simulated using finite element analysis in ANSYS software
Issued also as CD
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