TY  - BOOK
AU  - Fortin,Jeffrey B.
AU  - Zribi,Anis
TI  - Functional thin films and nanostructures for sensors: synthesis, physics and applications 
T2  - Integrated analytical systems
SN  - 0387362290 (hbk. : alk. paper)
AV  - TK7872.T55 F863 2009
U1  - 621.3815/2 22
PY  - 2009///
CY  - New York
PB  - Springer
KW  - Detectors
KW  - Nanoelectromechanical systems
KW  - Thin film devices
KW  - Dèunne Schicht
KW  - swd
KW  - Nanostrukturiertes Material
KW  - Sensor
KW  - Aufsatzsammlung
N1  - Includes bibliographical references and index; Sensor design guidelines / Anis Zribi -- Transduction principles / Jeffrey Fortin -- Growth and synthesis of nanostructured thin films / Yiping Zhao -- Integrated micromachining technologies for transducer fabrication / Wei Cheng Tian -- Applications of functional thin films and nanostructures in gas sensing / Audrey Nelson -- Chemical sensors : new ideas for the mature field / Radislav A. Potyrailo -- Applications of functional thin films for mechanical sensing / Chang Liu -- Sensing infrared and terahertz regions by functional films / Magnus Willander, Victor Ryzhii, Qingxiang Zhao
ER  -