TY - GEN AU - Tareq Mohamed Jamel Ashour AU - Lotfi Zaky Ismail , AU - Magdy Omr Omar , AU - Mohamed Salah Eldessouki , TI - Study of the physical properties of the semiconductor polymer thin films prepared by plasma enhanced chemical vapor deposition / PY - 2008/// CY - Cairo : PB - Tareq Mohamed Jamel Ashour , KW - N2 - laser KW - Nano - particles semi conductor KW - Plasma N1 - Thesis (Ph.D.) - Cairo University - Faculty Of Science - Department Of Physics; Issued also as CD N2 - The present work aims to produce semiconductor thin film using low - pressure microwave plasma chemical vapor deposition (LPMP - CVD) techique.This deposition has been done by constructing a special geometrical arrangement for sample boat and substrate inside the microwave plasma chamber UR - http://172.23.153.220/th.pdf ER -