Abdelhameed Elsayed Hamed Sharaf <br/><br/>
MEMS - based inertial sensors : design and implememtation /  
 تصميم وبناء الانظمة الكهروميكانيكية المتناهية فى الصغر 
Abdelhameed Elsayed Hamed Sharaf ; Supervsed Serag Eldin Elsayed Habib , Sherif Salah Eldin Sedky , Mahmoud Ali Ashour 
 - Cairo :   Abdelhameed Elsayed Hamed Sharaf ,   2011 
 - 137 P. :   charts , facsimiles ;   30cm 
<br/><br/>Thesis (Ph.D.) - Cairo University - Faculty of Engineering - Department of Electronics and Communication 
<br/><br/> This dissertation presents a detailed review of the micromachined inertial sensors . Three novel gyroscopes are designed analyzed and fabricated . The measurement setup used to characterize the fabricated devices is presented . Promising performance is obtained . A novel accelerometer structure is proposed which is based on a novel vertical suspension approach 
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<br/><br/><label>Subjects--Index Terms: </label>Accelerometer  Gyroscope  Microelectromechanical system