TY  - BOOK
AU  - Abdelhameed Elsayed Hamed Sharaf
AU  - Mahmoud Ali Ashour , 
AU  - Serag Eldin Elsayed Habib , 
AU  - Sherif Salah Eldin Sedky , 
TI  - MEMS - based inertial sensors : design and implememtation / 
PY  - 2011///
CY  - Cairo : 
PB  - Abdelhameed Elsayed Hamed Sharaf , 
KW  - Accelerometer
KW  - Gyroscope
KW  - Microelectromechanical system
N1  - Thesis (Ph.D.) - Cairo University - Faculty of Engineering - Department of Electronics and Communication; Issued also as CD
N2  - This dissertation presents a detailed review of the micromachined inertial sensors . Three novel gyroscopes are designed analyzed and fabricated . The measurement setup used to characterize the fabricated devices is presented . Promising performance is obtained . A novel accelerometer structure is proposed which is based on a novel vertical suspension approach
UR  - http://172.23.153.220/th.pdf
ER  -