Ahmed Hassen Ahmed Galmed <br/><br/>
Study of laser induced plasma spectroscopy of metallic layers on semiconductor substrate /  
 دراسة أستطياف البلازما المستحثة باليزر لطبقات معدنية على ارضية شبه موصلة 
Ahmed Hassen Ahmed Galmed ; Supervised Mohamed Abdelharith Mohamed , Arafa Kamal Kassem 
 - Cairo :   Ahmed Hassen Ahmed Galmed ,   2011 
 - 150 P. :   charts ;   25cm 
<br/><br/>Thesis (Ph.D.) - Cairo University - National Institute of Laser Enhanced Science - Department of Laser Application in Environmental Metroology Photochemistry and Agricultural 
<br/><br/> Thin film samples of Ti (213nm) deposited onto Si (100) substrate are studied using laser induced plasma spectroscopy (LIPS). Depth profiling was carried out on samples as deposited and after thermal annealing (10⁻⁵ mbar, 450 C) for 1,3 and 6 hours to investigate the metal semiconductor interface dynamics before and after annealing 
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<br/><br/><label>Subjects--Index Terms: </label>Depth profiling Laser induced plasma Thin films