| 000 | 00906caa a2200277 a 4500 | ||
|---|---|---|---|
| 003 | EG-GiCUC | ||
| 008 | 090111s1984 maua b 001 0 eng d | ||
| 040 |
_aEG-GiCUC _beng _cEG-GiCUC |
||
| 042 | _apcc | ||
| 092 | 0 | 4 |
_a621.381 _bM894 1984 _221 |
| 099 |
_a04 _a621.381 M894 1984 |
||
| 245 | 0 | 0 |
_a1984 MOS Products Catalog / _cAMI A Subsidiary of Gould Inc. |
| 246 | 3 | _aMaterials and process integration for MEMS | |
| 250 | _a2nd ed. | ||
| 260 |
_aSanta Clara, Boston : _bGould AMI Semicondactors, _cc1984. |
||
| 300 |
_a9.48, 47 p. : _bill. ; _c25 cm. |
||
| 490 | 1 |
_aMicrosystems ; _vv. 9 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems _xCatalog. |
|
| 710 | 2 | _aAmerican Microsystems Incorporation (AMI). | |
| 830 | 0 |
_aMicrosystems (Series) ; _vv. 9. |
|
| 902 | _a1 | ||
| 905 |
_aEman _eRev. |
||
| 905 |
_aJamal _eCat. |
||
| 942 |
_2ddc _cBK |
||
| 999 |
_c113078 _d113078 |
||