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003 EG-GICUC
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008 080823s2008 ua dh f m 000 0 eng d
040 _aEG-GICUC
_beng
_cEG-GICUC
041 0 _aEng
049 _aDeposite
097 _aPh.D
099 _aCai01.12.20.Ph.D.2008.Ta.S
100 0 _aTareq Mohamed Jamel Ashour
245 1 0 _aStudy of the physical properties of the semiconductor polymer thin films prepared by plasma enhanced chemical vapor deposition /
_cTareq M.J.Ashour ; Supervised Lotfi Z.Ismail , M.Salah Eldessouki , Magdy M.Omar
246 1 5 _aدراسة الخواص الفيزيائية للأغشية الرقيقة المكونة من اشباه الموصلات البوليمر المحضرة باستخدام عملية التبخير الكيميائى المعززة بالبلازما
260 _aCairo :
_bTareq Mohamed Jamel Ashour ,
_c2008
300 _a84Leaves :
_bcharts , facsimiles ;
_c30cm
502 _aThesis (Ph.D.) - Cairo University - Faculty Of Science - Department Of Physics
520 _aThe present work aims to produce semiconductor thin film using low - pressure microwave plasma chemical vapor deposition (LPMP - CVD) techique.This deposition has been done by constructing a special geometrical arrangement for sample boat and substrate inside the microwave plasma chamber
530 _aIssued also as CD
653 4 _aN2 - laser
653 4 _aNano - particles semi conductor
653 4 _aPlasma
700 0 _aLotfi Zaky Ismail ,
_eSupervisor
700 0 _aMagdy Omr Omar ,
_eSupervisor
700 0 _aMohamed Salah Eldessouki ,
_eSupervisor
856 _uhttp://172.23.153.220/th.pdf
905 _aMustafa
_eRevisor
905 _aSamia
_eCataloger
942 _2ddc
_cTH
999 _c12872
_d12872