000 01725cam a2200337 a 4500
003 EG-GiCUC
005 20250223030510.0
008 111025s2011 ua d f m 000 0 eng d
040 _aEG-GiCUC
_beng
_cEG-GiCUC
041 0 _aeng
049 _aDeposite
097 _aPh.D
099 _aCai01.24.05.Ph.D.2011.Ah.S
100 0 _aAhmed Hassen Ahmed Galmed
245 1 0 _aStudy of laser induced plasma spectroscopy of metallic layers on semiconductor substrate /
_cAhmed Hassen Ahmed Galmed ; Supervised Mohamed Abdelharith Mohamed , Arafa Kamal Kassem
246 1 5 _aدراسة أستطياف البلازما المستحثة باليزر لطبقات معدنية على ارضية شبه موصلة
260 _aCairo :
_bAhmed Hassen Ahmed Galmed ,
_c2011
300 _a150 P. :
_bcharts ;
_c25cm
502 _aThesis (Ph.D.) - Cairo University - National Institute of Laser Enhanced Science - Department of Laser Application in Environmental Metroology Photochemistry and Agricultural
520 _aThin film samples of Ti (213nm) deposited onto Si (100) substrate are studied using laser induced plasma spectroscopy (LIPS). Depth profiling was carried out on samples as deposited and after thermal annealing (10⁻⁵ mbar, 450 {u00B0}C) for 1,3 and 6 hours to investigate the metal semiconductor interface dynamics before and after annealing
530 _aIssued also as CD
653 4 _aDepth profiling
653 4 _aLaser induced plasma
653 4 _aThin films
700 0 _aArafa Kamal Kassem ,
_eSupervisor
700 0 _aMohamed Abdelharith Mohamed ,
_eSupervisor
856 _uhttp://172.23.153.220/th.pdf
905 _aNazla
_eRevisor
905 _aSamia
_eCataloger
942 _2ddc
_cTH
999 _c35990
_d35990