Novel production-ready machine learning flow for end-to-end nanolithography modeling and correction / (Record no. 177138)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 04029namaa22004331i 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | EG-GICUC |
| 005 - أخر تعامل مع التسجيلة | |
| control field | 20251229121237.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 251229s2025 ua a|||frm||| 000 0 eng d |
| 040 ## - CATALOGING SOURCE | |
| Original cataloguing agency | EG-GICUC |
| Language of cataloging | eng |
| Transcribing agency | EG-GICUC |
| Modifying agency | EG-GICUC |
| Description conventions | rda |
| 041 0# - LANGUAGE CODE | |
| Language code of text/sound track or separate title | eng |
| Language code of summary or abstract | eng |
| -- | ara |
| 049 ## - Acquisition Source | |
| Acquisition Source | Deposit |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38153 |
| 092 ## - LOCALLY ASSIGNED DEWEY CALL NUMBER (OCLC) | |
| Classification number | 621.38153 |
| Edition number | 21 |
| 097 ## - Degree | |
| Degree | Ph.D |
| 099 ## - LOCAL FREE-TEXT CALL NUMBER (OCLC) | |
| Local Call Number | Cai01.13.08.Ph.D.2025.Mo.N |
| 100 0# - MAIN ENTRY--PERSONAL NAME | |
| Authority record control number or standard number | Mohamed Serageldin Elsayed Habib, |
| Preparation | preparation. |
| 245 10 - TITLE STATEMENT | |
| Title | Novel production-ready machine learning flow for end-to-end nanolithography modeling and correction / |
| Statement of responsibility, etc. | by Mohamed Serageldin Elsayed Habib ; Supervisors Prof. Dr. Mohamed Fathy Abu-Elyazeed, Prof. Dr. Hossam Aly Hassan Fahmy. |
| 246 15 - VARYING FORM OF TITLE | |
| Title proper/short title | مخطط جديد جاهز للإنتاج لنمذجة وتصحيح الطباعة الضوئية النانوية مباشرة إلى الهدف باستخدام التعلم الآلي |
| 264 #0 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Date of production, publication, distribution, manufacture, or copyright notice | 2025. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 123 pages : |
| Other physical details | illustrations ; |
| Dimensions | 30 cm. + |
| Accompanying material | CD. |
| 336 ## - CONTENT TYPE | |
| Content type term | text |
| Source | rda content |
| 337 ## - MEDIA TYPE | |
| Media type term | Unmediated |
| Source | rdamedia |
| 338 ## - CARRIER TYPE | |
| Carrier type term | volume |
| Source | rdacarrier |
| 502 ## - DISSERTATION NOTE | |
| Dissertation note | Thesis (Ph.D)-Cairo University, 2025. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Bibliography: pages 115-123. |
| 520 #3 - SUMMARY, ETC. | |
| Summary, etc. | Mask optimization for lithography production is a computationally expensive process, and it requires multiple correction steps using advanced Resolution Enhancement Techniques (RETs) to reach the final photomask. Due to the cost, time and complexity of such RETs, Machine Learning (ML) algorithms are actively researched to reduce the time, complexity and cost required. In this thesis, we study the ML-RET state of the art and identify the challenges preventing a production-ready ML photomask optimization. Accordingly, we present a novel end-to-end ML-RET flow that addresses such challenges and enables consistent and scalable production-ready photomask optimization. |
| 520 #3 - SUMMARY, ETC. | |
| Summary, etc. | يتطلب تحسين القناع الطباعة الضوئية معالجات حسابية مكثفة. تحتاج عملية التصحيح إلى خطوات متعددة من عمليات تحسين الدقة للوصول إلى الأشكال النهائية للقناع الضوئي. نظراً للتكلفة والوقت والتعقيدات المرتبطة بتنفيذ هذه الأساليب, يتم بحث استخدام أساليب التعلم الآلي لخفض الوقت المطلوب لإنتاج القناع الضوئي وتخفيف الحمل الحسابي وتكلفة تطوير البرمجيات المطلوبة مع كل عقدة تكنولوجية جديدة. تبحث الرسالة الحالة التقنية لأساليب تحسين الدقة باستخدام التعلم الآلي, إضافةً إلى استنباط العوائق التي تحول دون استخدام هذه الأساليب في الإنتاج. وبناءاً علىه, تقترح الرسالة مخطط جديد مبتكر يساعد على حل هذه العقبات ويقوم بتنفيذ أساليب تحسين الدقة المطلوبة مباشرة في خطوة تصحيح واحدة متسقة وقابلة للتدريج وصديقة لتقنيات الإنتاج. |
| 530 ## - ADDITIONAL PHYSICAL FORM AVAILABLE NOTE | |
| Issues CD | Issues also as CD. |
| 546 ## - LANGUAGE NOTE | |
| Text Language | Text in English and abstract in Arabic & English. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Nanolithography |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | الطباعة النانوية |
| 653 #1 - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Semiconductor Manufacturing |
| -- | Optical Lithography |
| -- | Resolution Enhancement Techniques |
| -- | Optical Proximity Correction |
| -- | Machine learning |
| -- | تصنيع أشباه الموصلات |
| -- | الطباعة الضوئية |
| 700 0# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Mohamed Fathy Abu-Elyazeed |
| Relator term | thesis advisor. |
| 700 0# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Hossam Aly Hassan Fahmy |
| Relator term | thesis advisor. |
| 900 ## - Thesis Information | |
| Grant date | 01-01-2025 |
| Supervisory body | Mohamed Fathy Abu-Elyazeed |
| -- | Hossam Aly Hassan Fahmy |
| Discussion body | Faisal A. Elseddeek |
| -- | Elsayed M. Saad |
| Universities | Cairo University |
| Faculties | Faculty of Engineering |
| Department | Department of Electronics and Electrical Communications |
| 905 ## - Cataloger and Reviser Names | |
| Cataloger Name | Shimaa |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Koha item type | Thesis |
| Edition | 21 |
| Suppress in OPAC | No |
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